Cascade Microtech Introduces Breakthrough Wafer-level Electromigration Test System

Cascade Microtech, a FormFactor company (NASDAQ:FORM), and a leading supplier of solutions that enable precision measurements of discrete devices and integrated circuits (ICs) at the wafer level, today announced the launch of the Estrada-EM system – the industry’s first integrated measurement solution (IMS) to offer high-performance electromigration (EM) wafer-level reliability (WLR) testing of copper lines and vias in an oxygen-depleted environment. The Estrada-EM system delivers important WLR benefits to a test industry which has traditionally been limited to package-level reliability (PLR) test methods alone for EM. By overcoming several long-standing technical hurdles, this new product enables semiconductor reliability test programs to produce faster test results and assure high data integrity.

Electromigration is widely recognized to be a critical reliability issue for state of the art semiconductor technologies, and expected to become an even greater challenge at the 10 nm node and beyond. Proper evaluation of EM reliability necessitates the testing of many samples, under many conditions. By eliminating the packaging steps required for PLR, which delay the start of every test, the Estrada-EM WLR solution provides the same electromigration reliability answers days, or even weeks, sooner. In addition to eliminating the packaging delays, the system further boosts test program throughput with an extended-range thermal system for test acceleration, high-parallel test capacity, and unique features for unattended test which include automated in-situ probe alignment and autonomous dynamic thermal test profiles. The result is quicker technology evaluation cycles and faster fab process qualifications, for reduced time to market and increased profitability.
Today’s environment of shrinking reliability margins and increasingly sophisticated IC design rules demands not only fast results, but also highly accurate test data. WLR testing with the Estrada-EM IMS entirely avoids the risk of latent water and ESD damage which can occur in the test structures during the wafer sawing, structure bonding, and package handling which occurs for PLR. To further enhance data integrity, the system’s source measurement units (SMUs) incorporate unique performance capabilities such as programmable compliance to ensure the legitimacy of breakdown mechanisms and continuous monitoring to capture maximum data detail. This meticulous care leads to the industry’s most well-informed interconnect reliability models and technology decisions.
These benefits are extended to the full reliability test market by Cascade Microtech’s revolutionary PureZone oxygen-purging chamber system, which carefully wraps the wafer in an inert gas environment to prevent oxidation of copper pads and structures. This innovation enables, for the first time, direct testing of all wafers with copper interconnect technologies, including those without pad capping or passivation and even partially-processed wafers.
“Today’s technology race puts pressure on reliability labs for quicker answers, and the complexity of new nodes means a variety of materials and structures need to be evaluated in a compressed timeframe,” said Mike Slessor, President and CEO, FormFactor, Inc. “We’re happy to be able to help our customers accelerate design and qualification cycles by using EM WLR to complement EM PLR as they respond to emerging reliability challenges.”
Product Availability
The Estrada-EM system is available today for 300 mm wafer testing, with multiple package solutions built upon Cascade Microtech’s CM300xi semi- or fully-automated probe station. A worldwide team provides support and fast deployment of high-throughput WLR solutions. Visit www.cascademicrotech.com or contact a local representative to learn more.
About Cascade Microtech
Cascade Microtech, a company of FormFactor Inc.(NASDAQ:FORM), is a worldwide leader in precision contact, electrical measurement and test of integrated circuits (ICs), optical devices and other small structures. For technology businesses and scientific institutions that need to evaluate small structures, Cascade Microtech delivers access to electrical data from wafers, ICs, IC packages, circuit boards and modules, MEMS, 3D TSV, LED devices and more. Cascade Microtech’s leading-edge stations, probes, probe cards, advanced thermal subsystems and integrated systems deliver precision accuracy and superior performance both in the lab and during production manufacturing of high-speed and high-density semiconductor chips. For more information visit www.cascademicrotech.com.                  
Forward-Looking Statements
This press release contains forward-looking statements within the meaning of the “safe harbor” provisions of the Private Securities Litigation Reform Act of 1995, including with respect to the future demand for high-performance electromigration wafer-level reliability testing systems of the company. These statements are based on management’s current expectations and beliefs as of the date hereof. Forward-looking statements are subject to a number of risks and uncertainties, many of which are beyond the company’s control, that could cause actual results to differ materially from those described in the forward-looking statements, including those set forth in the company’s most recent annual report on Form 10-K, quarterly reports on Form 10-Q, and other filings by the company with the U.S. Securities and Exchange Commission. No assurances can be given that any of the events anticipated by the forward-looking statements will occur, or if any of them do so, what impact they will have on the results of operations or financial condition of the company. Unless required by law, the company is under no obligation (and expressly disclaims any such obligation) to update or revise its forward-looking statements whether as a result of new information, future events, or otherwise.

CONTACT INFORMATION
Trade Press                                                            
Laurie Winton                                                          
(503) 601-1934                                                           
Laurie.Winton@cmicro.com            
Investors
Stan Finkelstein
Investor Relations
(925) 290-4321
ir@formfactor.com